上海涌明自动化设备有限公司
規格: • 彩色或黑白系統 • (600x600x150*) mm, (900x1200x150*) mm, (1200x1500x150*) mm • U2xy= 3.5+L/250 µm • U1z= 3.0+L/250 µm • XY Repeatability 3.5 µm • Z Repeatability 3.0 µm • Magnification ~15x-400x raise to 300mm (Option) base on Type 4000 Series